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SE Series Dry Vacuum Unit

SE series semiconductor dry pump unit, with logo warning light, visualization side panel, nitrogen regulator etc. for intelligent control. Typical applications: semiconductor, photovoltaic, plasma, drying, coating, petrochemical, metallurgy, food.

Standard System - Vacculex

Product characteristics:

  • Compound system of semiconductor dry pump unit, high pumping capacity, high ultimate vacuum pumping degree, improving production efficiency, low operating cost, low energy consumption, low outlet temperature, optional side exhaust or bottom exhaust, no waste liquid discharge, small footprint, long service life.

  • Pure dry design, zero pollution to the pumping medium. Excellent seal design, zero leakage between oil tank and pump chamber. No oil and water in the flow channel, no waste oil and waste water discharge. Simple operation, easy to use, easy maintenance

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