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Top 10 Vacuum Pump Manufacturers in the World in 2026
The global vacuum industry includes manufacturers specializing in everything from compact rotary vane pumps to dry screw pumps, liquid ring systems, Roots boosters and turbomolecular pumps for high and ultra-high vacuum.
This means there is no single vacuum pump brand that is best for every application. A semiconductor manufacturer may prioritize dry and high-vacuum technology, while a chemical plant may need a corrosion-resistant dry screw or liquid ring system capable of handling solvents and condensable vapors.
This guide introduces 10 vacuum pump manufacturers and brands worth knowing in 2026, compares their core technologies and explains what each is best known for.
The list is intended as a brand and technology reference rather than a revenue or market-share ranking. Some brands also belong to the same parent industrial group but continue to operate with distinct product portfolios and market identities. Edwards and Leybold, for example, are brands within Atlas Copco Group, while Busch Vacuum Solutions and Pfeiffer Vacuum+Fab Solutions operate within Busch Group.
Top Vacuum Pump Manufacturers at a Glance
| Brand | Headquarters | Main Vacuum Technologies | Best Known For |
|---|---|---|---|
| Busch Vacuum Solutions | Germany | Rotary vane, dry screw, claw, liquid ring | Broad industrial vacuum portfolio |
| Atlas Copco | Sweden | Screw, liquid ring, claw, rotary vane | Industrial vacuum and centralized systems |
| Edwards Vacuum | United Kingdom | Dry screw, scroll, Roots, turbo | Semiconductor and advanced vacuum |
| Leybold | Germany | Dry screw, rotary vane, Roots, turbo | Industrial and high-vacuum systems |
| Pfeiffer Vacuum+Fab Solutions | Germany | Turbo, Roots booster, backing pumps | High and ultra-high vacuum |
| Becker | Germany | Rotary vane, claw, side channel | OEM and general industrial machinery |
| ULVAC | Japan | Dry, Roots, rotary vane, diffusion | Semiconductor and coating technology |
| EBARA | Japan | Dry vacuum pumps | Semiconductor and clean processes |
| NASH | United States | Liquid ring vacuum pumps | Heavy-duty wet process vacuum |
| Vacculex | China | Dry screw, Roots, liquid ring | Industrial process vacuum systems |
The purpose of this table is not to identify a universal “No. 1 vacuum pump manufacturer.” It is to show where the major brands differ.
How We Selected These Vacuum Pump Brands
The manufacturers were selected based on their current vacuum product portfolio, technical specialization, industrial presence and relevance across different vacuum technologies.
We also considered whether each brand represents a distinct choice for buyers. This is important because modern vacuum groups often own several independent product brands. Atlas Copco Group, for example, continues to market Edwards and Leybold as distinct vacuum brands, while Busch Group combines Busch’s rough- and medium-vacuum capabilities with Pfeiffer’s strength in high and ultra-high vacuum.
The list therefore compares brands from a buyer’s perspective, not corporate ownership structures.
Top 10 Vacuum Pump Manufacturers and Brands
Busch is one of the most recognizable names in industrial vacuum technology and offers an unusually broad range of pumping principles.
Its current portfolio includes rotary vane, dry screw, claw and liquid ring technologies as well as vacuum boosters and complete systems. Busch’s COBRA dry screw range alone covers applications from general industrial processes to demanding coating and semiconductor duties.
The company is particularly well known for its R5 rotary vane pumps in packaging and general industrial applications, MINK dry claw technology and COBRA screw pumps for processes requiring clean, dry compression.
Known for: broad industrial coverage, mature product families and a large international service network.
Best suited to: buyers who want to source several vacuum technologies from one global brand.
Atlas Copco has developed a broad industrial vacuum portfolio covering oil-sealed screw, dry screw, liquid ring, claw and rotary vane technologies.
Its current ranges include GHS VSD+ screw pumps, DHS dry screw pumps, DZS dry claw pumps and multiple liquid ring platforms, allowing the brand to cover applications from general manufacturing to demanding process vacuum.
Atlas Copco places particular emphasis on variable-speed control, centralized vacuum systems and energy management, making it relevant where vacuum demand changes during production.
Known for: industrial vacuum systems, variable-speed vacuum technology and integration with large manufacturing environments.
Best suited to: factories looking for centralized or energy-managed industrial vacuum rather than only a standalone pump.
Edwards is strongly associated with advanced dry vacuum and semiconductor applications.
The brand currently offers dry screw pumps such as the GXS range, dry scroll pumps, mechanical boosters and high-vacuum technologies used across scientific and semiconductor markets. Edwards is also a major brand within Atlas Copco Group’s Vacuum Technique business area.
Its strength is particularly visible in processes where clean operation, controlled pump temperature, high uptime and integration with advanced production equipment are important.
Known for: semiconductor vacuum, dry vacuum technology and advanced manufacturing.
Best suited to: semiconductor, coating, scientific and other technically demanding vacuum applications.
Since its founding in 1850, Leybold has been at the forefront of the vacuum industry. They have decades of experience in the manufacturing and application of vacuum systems, which has helped them develop some of the best vacuum pumps on the market today.
With their wide range of advanced vacuum solutions, Leybold offers a comprehensive range of solutions for applications in industrial manufacturing and analytical processes. Additionally, their team of highly trained and experienced employees is dedicated to providing the best customer service in the industry. Their innovative products combined with their state-of-the-art production technology in a global manufacturing network offer a unique advantage to customers worldwide.
Leybold combines a long vacuum-technology history with a current portfolio spanning rough, medium and high vacuum.
Its products include dry screw pumps, rotary vane pumps, RUVAC Roots boosters, turbomolecular pumps and complete engineered systems. Leybold’s DRYVAC systems, for example, combine dry screw backing pumps with Roots boosters for higher pumping speeds and lower operating pressures.
Leybold joined Atlas Copco Group in 2016 but continues to operate as a distinct vacuum brand focused on industrial and high-vacuum applications.
Known for: industrial vacuum, vacuum furnaces, coating and combined Roots + backing-pump systems.
Best suited to: applications that require a transition from industrial forevacuum into higher-vacuum operating ranges.
Pfeiffer is particularly well known for high and ultra-high vacuum technology.
The brand pioneered turbomolecular vacuum pumping and today provides turbopumps, Roots-type vacuum boosters, backing pumps and complete configurable vacuum systems. Pfeiffer’s HiLobe boosters, for example, cover pumping speeds from hundreds to more than 10,000 m³/h and are designed to operate with suitable backing pumps.
Following the integration of Busch Group’s vacuum businesses, the brand is now presented as Pfeiffer Vacuum+Fab Solutions, with a particularly strong focus on high vacuum, semiconductor and fab-related technology.
Known for: turbomolecular technology, high vacuum, leak detection and precision vacuum systems.
Best suited to: scientific, analytical, coating, semiconductor and high-vacuum manufacturing.
Becker is widely associated with compact and medium-capacity vacuum technology for machinery and OEM applications.
Its portfolio includes oil-lubricated and oil-free rotary vane pumps as well as other dry vacuum technologies. Becker’s oil-free rotary vane ranges are designed for continuous low-vacuum operation, while its oil-lubricated vane pumps cover applications requiring deeper vacuum.
The brand is particularly relevant where a vacuum pump is integrated directly into production machinery rather than installed as a large process-vacuum system.
Known for: rotary vane vacuum pumps, compact designs and OEM machinery integration.
Best suited to: printing, packaging, woodworking, plastics and equipment manufacturers.
ULVAC combines vacuum pumps with broader vacuum-process and thin-film manufacturing technology.
Its current pump portfolio includes dry pumps, rotary piston pumps, rotary vane pumps, mechanical boosters and diffusion pumps. The latest dry portfolio also includes Roots-type and screw-type dry technologies.
ULVAC is especially visible in semiconductor, coating, electronics and materials-processing markets. Its newer LS dry screw series is designed for clean, continuous industrial operation and covers pumping speeds up to approximately 1,200 m³/h.
Known for: semiconductor, thin-film, coating and integrated vacuum process technology.
Best suited to: high-tech manufacturing environments where the pump is part of a larger vacuum production process.
EBARA has a particularly strong position in semiconductor dry vacuum.
Its dry vacuum pumps use non-contact pumping mechanisms without oil or sealing liquid in the compression space, supporting clean vacuum for semiconductor, display, solar and analytical applications. EBARA states that it has shipped more than 200,000 dry vacuum pumps and maintains more than 50 service locations worldwide.
The company continues to expand its semiconductor-oriented dry pump portfolio, including newer models designed for higher process gas loads and improved resistance to reaction by-products.
Known for: semiconductor dry vacuum, clean operation and high-volume production support.
Best suited to: semiconductor and electronics manufacturing where continuous operation and process cleanliness are critical.
NASH is one of the most specialized brands in this list.
Rather than trying to cover every vacuum technology, it focuses strongly on liquid ring vacuum pumps and compressors for demanding industrial processes.
Its current portfolio includes small, medium and very large liquid ring pumps as well as two-stage designs for lower operating pressures. NASH specifically positions these products for industries including chemical processing, pulp and paper, power and mining.
This specialization makes NASH particularly relevant where the gas stream contains significant moisture, vapor or liquid carryover.
Known for: heavy-duty liquid ring vacuum technology.
Best suited to: wet process gas, power generation, pulp and paper, chemical plants and large continuous-duty applications.
Vacculex
Vacculex is a China-based vacuum pump manufacturer focused on industrial process vacuum rather than high-vacuum laboratory equipment.
Its core product portfolio includes Dry Screw Vacuum Pumps, Roots Vacuum Pumps and Liquid Ring Vacuum Pumps.
Vacculex’s published dry screw range covers approximately 110–2,700 m³/h, while its Roots portfolio extends from about 170 to 110,000 m³/h. The company also supplies Roots + screw and Roots + liquid ring combinations through its Customized Vacuum Systems.
Known for: dry screw, Roots booster and liquid ring process-vacuum systems.
Best suited to: chemical processing, pharmaceuticals, evaporation, distillation, solvent handling and industrial projects requiring customized vacuum configurations.
Comparing Vacuum Pump Brands for a New Project?
Brand recognition is useful, but the correct vacuum technology depends on your process.
Send Vacculex your application, required pressure, pumping speed and gas composition to compare dry screw, Roots and liquid ring options for your operating conditions.
Vacuum Pump Brands by Technology
A global brand comparison becomes much more useful once the required vacuum technology is known.
Dry Screw Vacuum Pump Brands
Dry screw pumps are widely used where the compression chamber should remain free from oil or sealing water.
Busch, Atlas Copco, Edwards, Leybold, ULVAC and Vacculex all currently offer dry screw or closely related dry industrial technologies.
Their strengths differ. Edwards and ULVAC have strong exposure to semiconductor and high-tech manufacturing, while Busch, Atlas Copco and Leybold cover broad industrial applications. Vacculex focuses more heavily on chemical and process vacuum.
For industrial process applications, explore Vacculex Dry Screw Vacuum Pumps.
Liquid Ring Vacuum Pump Brands
Liquid ring pumps are particularly relevant when vacuum systems must handle wet gas, water vapor or condensable process streams.
NASH is one of the most specialized liquid ring brands globally. Busch and Atlas Copco also maintain substantial liquid ring portfolios, while Vacculex supplies several single- and two-stage product families.
For process applications involving moisture or condensable gas, see Vacculex Liquid Ring Vacuum Pumps.
Roots Vacuum Pump Brands
Roots pumps, also called mechanical vacuum boosters, are typically combined with a suitable backing pump to increase pumping speed in rough- and medium-vacuum systems.
Leybold, Pfeiffer, Edwards, ULVAC and Vacculex all offer Roots-type booster technology or systems built around this principle.
For large industrial systems, the booster and backing pump should be selected together rather than treated as two independent pumps.
Explore Vacculex Roots Vacuum Pumps.
High Vacuum Pump Brands
For high and ultra-high vacuum, the strongest brands in this list include Pfeiffer, Edwards, Leybold and ULVAC.
These manufacturers offer technologies such as turbomolecular and diffusion pumps, normally combined with suitable backing pumps.
A standard process-vacuum supplier should not automatically be compared directly with a high-vacuum specialist because the target pressure range, system architecture and applications are fundamentally different.
Looking for Industrial Vacuum Pump Manufacturers?
This page is designed as a global vacuum pump brand overview.
If your real question is:
- Which manufacturer is best for 24/7 industrial operation?
- Which brand is better for chemical processing?
- Which supplier has stronger spare-parts and service support?
- How should I compare total cost of ownership?
- Which pump is best for wet gas, heavy duty or continuous processing?
read our detailed guide to Industrial Vacuum Pump Manufacturers.
That comparison focuses more heavily on industrial application fit, continuous-duty capability, gas compatibility, service and lifecycle cost.
Looking for a Vacuum Pump Manufacturer in China?
Buyers sourcing directly from China have a different set of priorities.
Factory capability, OEM customization, export experience, engineering support, manufacturing control and quotation structure become more important than global brand recognition alone.
For that sourcing scenario, see our guide to Vacuum Pump Manufacturers in China.
It compares China-based manufacturers from a procurement and supplier-selection perspective rather than a global-brand perspective.
How to Choose Between Vacuum Pump Brands
The strongest brand on paper may still be the wrong choice for a particular process.
Compare the Technology Portfolio
Start with the required pumping principle.
If the process contains solvent vapor, oil-free dry screw technology may be worth evaluating. Wet gas may favor liquid ring technology. Higher pumping capacity at lower pressure may require a Roots booster, while semiconductor and analytical processes may require dry backing pumps and turbomolecular technology.
Once the technology is defined, the relevant brand shortlist becomes much smaller.
Look for Relevant Application Experience
A manufacturer may have decades of experience in vacuum technology but limited experience with your specific gas or process.
Ask whether the supplier has worked with similar applications, particularly when handling corrosive gas, solvent vapor, condensable material or difficult process residues.
Application experience can matter more than total company size.
Check Service Availability
Global service coverage varies significantly between manufacturers and countries.
Before selecting a brand, determine where spare parts are stocked, whether local repair capability exists and how technical troubleshooting is handled in your market.
A well-known global brand may provide a stronger local service network, while a smaller manufacturer may offer more direct factory engineering support.
Evaluate System Engineering Capability
Some projects require much more than a vacuum pump.
A complete system may include a Roots booster, backing pump, condenser, separator, heat exchanger, valves, instrumentation and controls.
If the project requires several components to operate as one system, compare suppliers by engineering capability rather than standalone pump specifications.
Vacculex provides Customized Vacuum Systems combining technologies such as Roots + screw and Roots + liquid ring for different industrial operating conditions.
Frequently Asked Questions
What Are the Top Vacuum Pump Manufacturers in the World?
Well-known global vacuum brands include Busch, Atlas Copco, Edwards, Leybold, Pfeiffer, Becker, ULVAC, EBARA and NASH, while manufacturers such as Vacculex focus on specific industrial process-vacuum markets.
There is no universally accepted market-share ranking covering every vacuum technology, so the most useful comparison is based on technology and application rather than an unsupported numerical ranking.
What Are the Best Vacuum Pump Brands?
The answer depends on the required vacuum range.
Busch and Atlas Copco offer broad industrial portfolios. Edwards, Pfeiffer, Leybold and ULVAC have strong high-tech and high-vacuum capabilities. EBARA is particularly prominent in semiconductor dry vacuum, while NASH specializes heavily in liquid ring technology.
For chemical and industrial process vacuum, suppliers such as Busch, Atlas Copco, Leybold and Vacculex may be more relevant depending on gas conditions.
Which Brands Make Dry Screw Vacuum Pumps?
Current dry screw or industrial dry-pump suppliers include Busch, Atlas Copco, Edwards, Leybold, ULVAC and Vacculex.
Selection should consider more than ultimate pressure. Gas temperature, solvent content, corrosion, condensation risk and required pumping speed are all important.
Which Brands Make Liquid Ring Vacuum Pumps?
NASH is highly specialized in liquid ring technology, while Busch, Atlas Copco and Vacculex also offer industrial liquid ring vacuum pumps and systems.
The correct model depends strongly on required pressure, gas load and seal-liquid temperature.
Conclusion
There is no single best vacuum pump brand for every application.
Busch and Atlas Copco provide broad industrial portfolios. Edwards, Leybold and Pfeiffer offer strong advanced-vacuum capabilities. Becker serves many OEM and machinery applications. ULVAC and EBARA have significant exposure to semiconductor and clean-process manufacturing. NASH specializes in liquid ring technology, while Vacculex focuses on dry screw, Roots, liquid ring and customized industrial process-vacuum systems.
The most practical selection sequence is:
Define the Application → Identify the Vacuum Technology → Shortlist Relevant Brands → Compare Technical Capability and Support
If your project has already moved beyond brand research, the next step is not another manufacturer ranking.
It is to provide the operating parameters and select the pump around the real process.